This first textbook on both micro- and nanooptics introduces readers to the technological development, physical background and key areas. The opening chapters on the physics of light are complemented by chapters on refractive and diffractive optical elements. The internationally renowned authors present different methods of lithographic and nonlithographic fabrication of microoptics and introduce the characterization and testing of microoptics. The second part of the book is dedicated to optical microsystems and MEMS, optical waveguide structures and optical nanostructures, including photonic crystals and metamaterials. Each chapter includes exercises illustrating a sample approach to new and complex topics, making the textbook suitable for lectures on optics as part of a physics or electrical engineering course. 

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Helfert Stefan Introduction to Micro- and Nanooptics